DESIGN OF AN EXPERIMENTAL REACTOR FOR INTRINSIC KINETICS OF CHEMICAL VAPOR-DEPOSITION

Despite the importance of intrinsic kinetics in chemical vapor deposition, no satisfactory experimental reactor or method has been devised for the determination of intrinsic kinetics. Presented is the design of such a reactor and its use for the determination of intrinsic kinetics. The design involves satisfying five conditions. Any rectangular, horizontal reactor designed so as to satisfy the conditions can be used for intrinsic kinetics. Use of the experimental reactor for uniform deposition is discussed.