SILICIDE FORMATION BY DIRECT METAL IMPLANTATION

被引：0
|
作者：
KOZICKI, MN [1 ]
机构：
[1] ARIZONA STATE UNIV,CTR SOLID STATE ELECTR RES,TEMPE,AZ 85287
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 8B期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C450 / C450
页数：1
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