FORMATION OF RARE-EARTH-METAL SILICIDE FILMS AND PROPERTIES OF THE SILICIDE SILICON PHASE-BOUNDARY

被引：0
|
作者：
MILYUTKIN, EA
ROZHKOV, VA
机构：
[1] Kuibyshev State Univ, USSR, Kuibyshev State Univ, USSR
来源：
SOVIET MICROELECTRONICS | 1985年 / 14卷 / 01期
关键词：
MICROELECTRONICS - RARE EARTH COMPOUNDS - SEMICONDUCTING FILMS - SEMICONDUCTOR DEVICES - Junctions - SOLID STATE DEVICES; THIN FILM;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The present paper is dedicated to the investigation of the process of formation of thin films of gadolinium and dysprosium silicides on a silicon surface and to the study of the electrophysical properties of the silicide - silicon phase boundary.
引用
收藏
页码：23 / 26
页数：4
相关论文
共 50 条
  • [1] PHASE SEQUENCE OF SILICIDE FORMATION AT METAL - SILICON INTERFACES
    PRETORIUS, R
    VACUUM, 1990, 41 (4-6) : 1038 - 1042
  • [2] RARE-EARTH SILICIDE FORMATION THROUGH CONTACT REACTION WITH SILICON
    THOMPSON, RD
    TSAUR, BY
    TU, KN
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) : C103 - C103
  • [3] Formation of Manganese Silicide Films on Silicon
    K. Adambaev
    A. Yusupov
    K. Yakubov
    Inorganic Materials, 2003, 39 : 942 - 946
  • [4] Formation of manganese silicide films on silicon
    Adambaev, K
    Yusupov, A
    Yakubov, K
    INORGANIC MATERIALS, 2003, 39 (09) : 942 - 946
  • [5] METAL SILICON REACTIONS AND SILICIDE FORMATION
    SHIBATA, T
    WAKITA, A
    SIGMON, TW
    GIBBONS, JF
    SEMICONDUCTORS AND SEMIMETALS, 1984, 17 : 341 - 395
  • [6] Ion formation of metal silicide films
    Danilina T.I.
    Chistoedova I.A.
    Polyntsev E.S.
    Applied Physics, 2022, (06): : 68 - 75
  • [7] Formation of higher manganese silicide films on silicon
    T. S. Kamilov
    D. K. Kabilov
    I. S. Samiev
    Kh. Kh. Khusnutdinova
    R. A. Muminov
    V. V. Klechkovskaya
    Technical Physics, 2005, 50 : 1102 - 1104
  • [8] Formation of higher manganese silicide films on silicon
    Kamilov, TS
    Kabilov, DK
    Samiev, IS
    Khusnutdinova, KK
    Muminov, RA
    Klechkovskaya, VV
    TECHNICAL PHYSICS, 2005, 50 (08) : 1102 - 1104
  • [9] SILICIDE FORMATION BY METAL-SILICON INTERACTIONS
    TU, KN
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (03) : C78 - C78
  • [10] Metallic rare-earth silicide nanowires on silicon surfaces
    Daehne, Mario
    Wanke, Martina
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2013, 25 (01)
12345