STUDY OF THE DIFFUSION OF GALLIUM IN SILICON BY SECONDARY ION MASS-SPECTROMETRY AND NEUTRON-ACTIVATION

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作者
GAUNEAU, M [1 ]
RUPERT, A [1 ]
HARIDOSS, S [1 ]
BENIERE, F [1 ]
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[1] IUT LAB PHYS MATERIAUX,F-22302 LANNION,FRANCE
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O65 [分析化学];
学科分类号
070302 ; 081704 ;
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页码:142 / 147
页数:6
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