APFIM STUDIES OF COMPOSITIONAL INHOMOGENEITY IN SPUTTERED CO-CR THIN-FILMS

被引：14
|
作者：
HONO, K [1 ]
MAEDA, Y [1 ]
LI, JL [1 ]
SAKURAI, T [1 ]
机构：
[1] NIPPON TELEGRAPH & TEL PUBL CORP, BASIC RES LABS, TOKAI, IBARAKI 31911, JAPAN
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期
关键词：
D O I：
10.1109/20.281289
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Atom probe analysis results of Co-22at%CR bulk alloy and its thin films are presented. While no compositional inhomogeneity is detected from the bulk sample, a significant compositional fluctuation is present in the thin film specimen which is sputter deposited on a heated substrate. The concentration of the Cr enriched region is in the range of 30 - 40 at.%Cr, while that of the Cr depleted region is approximately 5 at.%Cr. Such compositional fluctuations are present within a grain. These results are in agreement with NMR and TEM results.
引用
收藏
页码：3745 / 3747
页数：3
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