SEGREGATION IN SPUTTERED CO-CR FILMS

被引:40
|
作者
MAEDA, Y
ASAHI, M
机构
关键词
D O I
10.1109/TMAG.1987.1065611
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:2061 / 2063
页数:3
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