ADVANCES IN PLASMA-ETCHING

被引：0
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作者：
FLAMM, DL
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来源：
SOLID STATE TECHNOLOGY | 1991年 / 34卷 / 04期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：105 / 105
页数：1
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