共 50 条
- [21] Progress in e-beam mask making for optical and X-ray lithographyProceedings of the International Conference on Microlithography, 1991,Pfeiffer, H.C.Groves, T.R.
- [22] Reflectivity test of X-ray mirrors for deep X-ray lithographyMicrosystem Technologies, 2008, 14 : 1299 - 1303V. NazmovE. ReznikovaA. LastM. BoernerJ. Mohr
- [23] FABRICATION OF CARBON MEMBRANE X-RAY MASK FOR X-RAY LITHOGRAPHYPROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION (IMECE 2010), VOL 10, 2012, : 279 - 283Noda, DaijiTakahashi, NaokiTokuoka, AtsushiKatori, MegumiHattori, Tadashi
- [24] Reflectivity test of X-ray mirrors for deep X-ray lithographyMICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (9-11): : 1299 - 1303Nazmov, V.Reznikova, E.Last, A.Boerner, M.Mohr, J.
- [25] Validation of X-ray lithography and development simulation system for moving mask deep X-ray lithographyJOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (01) : 159 - 168Hirai, YHafizovic, SMatsuzuka, NKorvink, JGTabata, O
- [26] Fabrication of x-ray lithography masks with optical lithographyJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4345 - 4349LaTulipe, DMaldonado, JRMitchell, PLeduc, RBabich, I
- [27] Fabrication of x-ray lithography masks with optical lithographyJournal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1996, 14 (06):La, Tulipe, D.Maldonado, J.R.Mitchell, P.Leduc, R.Babich, I.
- [28] A PLASMA X-RAY SOURCE FOR X-RAY-LITHOGRAPHYJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 243 - 247OKADA, ISAITOH, YITABASHI, SYOSHIHARA, H
- [29] Fabrication of X-Ray Gratings Using X-Ray Lithography Technique for X-Ray Talbot InterferometerJOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 156 (05) : H299 - H302Noda, DaijiTsujii, HiroshiTakahashi, NaokiHattori, Tadashi