PREPARATION OF HIGH-TC YBACUO THIN-FILMS ON YSZ AND SILICON SUBSTRATES BY RF-MAGNETRON SPUTTERING

被引:8
|
作者
DUBREUIL, D
GARRY, G
LEMAITRE, Y
ROGIER, L
DIEUMEGARD, D
机构
来源
JOURNAL OF THE LESS-COMMON METALS | 1989年 / 151卷 / 1-2期
关键词
D O I
10.1016/0022-5088(89)90331-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:303 / 310
页数:8
相关论文
共 50 条
  • [11] PREPARATION OF HIGH-TC SUPERCONDUCTING OXIDE THIN-FILMS BY ECR SPUTTERING
    MATSUURA, T
    KUBOTA, E
    IGARASHI, M
    KONAKA, T
    MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 1990, 184 : 213 - 217
  • [12] PREPARATION OF CA-DOPED YBACUO THIN-FILMS CONTAINING 248 PHASE BY RF MAGNETRON SPUTTERING
    KURODA, K
    KOJIMA, K
    TANIOKU, M
    YOKOYAMA, K
    HAMANAKA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (08): : L1439 - L1442
  • [13] InN thin films deposited on flexible substrates by reactive RF-magnetron sputtering
    Zoita, N. C.
    Besleaga, C.
    Braic, L.
    Mitran, T.
    Grigorescu, C.
    Nedelcu, L.
    OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2008, 2 (11): : 719 - 720
  • [14] PREPARATION AND PROPERTIES OF (PB,LA)TIO3 PYROELECTRIC THIN-FILMS BY RF-MAGNETRON SPUTTERING
    NAGAO, N
    TAKEUCHI, T
    IIJIMA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B): : 4065 - 4068
  • [15] Preparation and characterisation of PZT films by RF-magnetron sputtering
    Frunza, Raluca
    Ricinschi, Dan
    Gheorghiu, Felicia
    Apetrei, Radu
    Luca, Dumitru
    Mitoseriu, Liliana
    Okuyama, Masanori
    JOURNAL OF ALLOYS AND COMPOUNDS, 2011, 509 (21) : 6242 - 6246
  • [16] Preparation of lead chromate crystalline thin films by RF-magnetron sputtering method
    Suga, Y
    Hiramatsu, T
    Kaneko, F
    Nanba, N
    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2002, 110 (02) : 98 - 101
  • [17] PREPARATION OF LA-MODIFIED LEAD TITANATE THIN-FILMS BY RF-MAGNETRON SPUTTERING METHOD AND THEIR PYROELECTRIC PROPERTIES
    KAMADA, T
    KOMAKI, K
    HAYASHI, S
    KITAGAWA, M
    TAKAYAMA, R
    DEGUCHI, T
    HIRAO, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1995, 34 (2B): : L233 - L235
  • [18] Characterization of PZT Ferroelectric Thin Films by RF-magnetron Sputtering
    Bi, Zhenxing
    Zhang, Zhisheng
    Fan, Panfeng
    PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY, 2007, 61 : 120 - 124
  • [19] SYNTHESIS OF CUPROUS OXIDE THIN FILMS BY RF-MAGNETRON SPUTTERING
    Li, Wenhao
    SURFACE REVIEW AND LETTERS, 2018, 25 (02)
  • [20] FORMATION OF AS-GROWN YBACUO THIN-FILMS BY RF MAGNETRON SPUTTERING FROM 3 TARGETS
    KURODA, K
    KOJIMA, K
    TANIOKU, M
    YOKOYAMA, K
    HAMANAKA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (10): : 1797 - 1801