MICROMACHINING OF OPTICAL STRUCTURES WITH FOCUSED ION-BEAMS

被引：27

作者：

HARRIOTT, LR

SCOTTI, RE

CUMMINGS, KD

AMBROSE, AF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583865

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：207 / 210

页数：4

共 50 条

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