LOW-TEMPERATURE ION-BEAM MIXING OF AL-SB

被引：18
|
作者：
DELAFOND, J [1 ]
PICRAUX, ST [1 ]
KNAPP, JA [1 ]
机构：
[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185
来源：
APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 04期
关键词：
D O I：
10.1063/1.92329
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：237 / 240
页数：4
相关论文
共 50 条
  • [41] MICROALLOYING BY ION-BEAM MIXING
    TSAUR, BY
    LAU, SS
    HUNG, LS
    MAYER, JW
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 67 - 77
  • [42] PROGRESS IN ION-BEAM MIXING
    MATTESON, S
    [J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1983, 30 (02) : 1705 - 1708
  • [43] DEPENDENCE OF THE ION-BEAM MIXING RATE IN PD/AL BILAYERS ON THE DENSITY OF DEPOSITED ENERGY AND TEMPERATURE
    DESIMONI, J
    TRAVERSE, A
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 66 (04): : 415 - 419
  • [44] ION-BEAM MIXING VARIANCE PROFILES OF AL AND PD IN AL/PD BILAYERS
    SONG, JH
    KIM, SO
    CHAE, KH
    WOO, JJ
    WHANG, CN
    SMITH, RJ
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 52 (01): : 19 - 24
  • [45] Effect of ion-beam mixing temperature on cobalt silicide formation
    Kasko, I.
    Dehm, C.
    Frey, L.
    Ryssel, H.
    [J]. Nuclear Instruments & Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1993, 80-81 (pt 2):
  • [46] Temperature dependence of ion-beam mixing in Fe/Zr bilayers
    Ding, Fu-Rong
    Okamoto, P.R.
    Rehn, L.E.
    [J]. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1989, B39 (1-4) : 122 - 125
  • [47] EFFECT OF ION-BEAM MIXING TEMPERATURE ON COBALT SILICIDE FORMATION
    KASKO, I
    DEHM, C
    FREY, L
    RYSSEL, H
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 786 - 789
  • [48] ION-BEAM MIXING IN SILICON AND GERMANIUM AT LOW-TEMPERATURES
    CLARK, GJ
    MARWICK, AD
    POKER, DB
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 107 - 114
  • [49] LOW-TEMPERATURE HETEROEPITAXIAL FILM GROWTH OF SI ON SAPPHIRE BY REACTIVE ION-BEAM DEPOSITION
    YAMADA, H
    TORII, Y
    [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) : 2298 - 2301
  • [50] LOW-TEMPERATURE ION-BEAM ENHANCED GRAIN-GROWTH IN THIN-FILMS
    ATWATER, HA
    SMITH, HI
    THOMPSON, CV
    [J]. JOURNAL OF ELECTRONIC MATERIALS, 1987, 16 (04) : A7 - A7
12345