AMORPHOUS SILICON-SILICON NITRIDE THIN-FILM TRANSISTORS

被引：144

|

作者：

POWELL, MJ

EASTON, BC

HILL, OF

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 10期

关键词：

D O I：

10.1063/1.92166

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：794 / 796

页数：3

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