AMORPHOUS SILICON-SILICON NITRIDE THIN-FILM TRANSISTORS

被引：144
|
作者：
POWELL, MJ
EASTON, BC
HILL, OF
机构：
来源：
APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 10期
关键词：
D O I：
10.1063/1.92166
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：794 / 796
页数：3
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