STRUCTURAL AND ELECTRONIC-PROPERTIES OF CVD SILICON FILMS NEAR THE CRYSTALLIZATION TEMPERATURE

被引：6

作者：

MAGARINO, J

KAPLAN, D

BISARO, R

MORHANGE, JF

ZELLAMA, K

机构：

[1] UNIV PARIS 06,PHYS SOLIDES LAB,F-75230 PARIS 05,FRANCE

[2] UNIV PARIS 07,ECOLE NORM SUPER,PHYS SOLIDES GRP,F-75221 PARIS 05,FRANCE

来源：

JOURNAL DE PHYSIQUE | 1982年 / 43卷 / NC1期

关键词：

D O I：

10.1051/jphyscol:1982137

中图分类号：

学科分类号：

摘要：

引用

页码：271 / 276

页数：6

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