STRUCTURAL AND ELECTRONIC-PROPERTIES OF CVD SILICON FILMS NEAR THE CRYSTALLIZATION TEMPERATURE

被引：6

作者：

MAGARINO, J

KAPLAN, D

BISARO, R

MORHANGE, JF

ZELLAMA, K

机构：

[1] UNIV PARIS 06,PHYS SOLIDES LAB,F-75230 PARIS 05,FRANCE

[2] UNIV PARIS 07,ECOLE NORM SUPER,PHYS SOLIDES GRP,F-75221 PARIS 05,FRANCE

来源：

JOURNAL DE PHYSIQUE | 1982年 / 43卷 / NC1期

关键词：

D O I：

10.1051/jphyscol:1982137

中图分类号：

学科分类号：

摘要：

引用

页码：271 / 276

页数：6

共 50 条

[1] PREPARATION AND ELECTRONIC-PROPERTIES OF CVD AMORPHOUS-SILICON
BOOTH, DC
SERAPHIN, BO
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (08) : C401 - C401
[2] Correlated structural and electronic properties of microcrystalline silicon films deposited at low temperature by catalytic CVD
Bourée, JE
THIN SOLID FILMS, 2001, 395 (1-2) : 157 - 162
[3] ELECTRONIC-PROPERTIES OF AMORPHOUS-SILICON SELENIUM FILMS
WAKIM, FG
ABONAMOUS, SA
ALJASSAR, A
HASSAN, MA
APPLIED PHYSICS LETTERS, 1983, 42 (06) : 523 - 524
[4] EFFECT OF ANNEALING ON STRUCTURAL AND ELECTRONIC-PROPERTIES OF PROFILED SILICON
ABROSIMOV, NV
BAZHENOV, AV
GONCHAROV, VA
EROFEEVA, SA
IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1983, 47 (02): : 356 - 360
[5] STRUCTURAL, OPTICAL AND ELECTRONIC-PROPERTIES OF MIXED DIELECTRIC FILMS
THIELSCH, R
MEILING, W
GORING, E
VACUUM, 1990, 41 (4-6) : 1147 - 1150
[6] STRUCTURAL AND ELECTRONIC-PROPERTIES OF QUASI-ONE DIMENSIONAL HYDROGENATED AMORPHOUS-SILICON FILMS
NITTA, S
KAWAI, M
MURASE, I
SAKAIDA, M
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 257 - 260
[7] ROLE OF BORON IN THE STRUCTURAL AND ELECTRONIC-PROPERTIES OF HYDROGENATED SILICON FILMS DEPOSITED BY RF MAGNETRON SPUTTERING
BANERJEE, R
BHATTACHARYYA, TK
SHARMA, SN
BATABYAL, AK
BARUA, AK
BANERJEE, D
BHUSARI, DM
KSHIRSAGAR, ST
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1995, 71 (02): : 115 - 125
[8] THE ELECTRONIC-PROPERTIES OF DISLOCATIONS IN SILICON
WILSHAW, PR
FELL, TS
INSTITUTE OF PHYSICS CONFERENCE SERIES, 1989, (104): : 85 - 96
[9] THE ELECTRONIC-PROPERTIES OF DISLOCATIONS IN SILICON
WILSHAW, PR
FELL, TS
STRUCTURE AND PROPERTIES OF DISLOCATIONS IN SEMICONDUCTORS 1989, 1989, 104 : 85 - 96
[10] THE STRUCTURAL, CATALYTIC, AND ELECTRONIC-PROPERTIES OF MONOLAYER METALLIC-FILMS
GOODMAN, DW
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) : C157 - C157

← 1 2 3 4 5 →