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FULLY AUTOMATED SEM IMAGE-ANALYSIS

被引：6
|
作者：
EDWARDS, RM [1 ]
LEBIEDZIK, J [1 ]
STONE, G [1 ]
机构：
[1] IBM CORP,DIV GEN PROD,SAN JOSE,CA 95193
来源：
SCANNING | 1986年 / 8卷 / 05期
关键词：
D O I：
10.1002/sca.4950080505
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：221 / 231
页数：11
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