DEVICE FOR PRECISE ALIGNMENT OF ELECTRON-BEAM AND SAMPLE IN SCANNING ELECTRON-MICROSCOPE

被引：0

作者：

GIBSON, ED

VERHOEVEN, JD

机构：

[1] US ERDA,AMES LAB,AMES,IA 50010

[2] IOWA STATE UNIV,DEPT MAT SCI & ENGN,AMES,IA 50010

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1977年 / 10卷 / 10期

关键词：

D O I：

10.1088/0022-3735/10/10/029

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1076 / 1077

页数：2

共 50 条

[1] USE OF AN REM-200 SCANNING ELECTRON-MICROSCOPE FOR SCANNING ELECTRON-BEAM ANNEALING
SAINOV, NA
[J]. INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1983, 26 (04) : 964 - 965
[2] ELECTRON-BEAM INDUCED CURRENT (EBIC) AS A FUNCTION OF THE ANGLE OF INCIDENCE OF THE ELECTRON-BEAM IN A SCANNING ELECTRON-MICROSCOPE (SEM)
JAKUBOWICZ, A
[J]. SOLID-STATE ELECTRONICS, 1982, 25 (07) : 651 - 653
[3] ELECTRON-BEAM CURRENT MEASUREMENT IN THE ELECTRON-MICROSCOPE
NICHOLSON, WAP
[J]. JOURNAL OF MICROSCOPY-OXFORD, 1981, 121 (FEB): : 141 - 147
[4] STUDY OF ELECTRON-BEAM EFFECTS AND DISLOCATION BY SCANNING ELECTRON-MICROSCOPE ON AGI CRYSTALS
BHALLA, AS
WHITE, EW
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (08) : C229 - &
[5] EFFECT OF ELECTRON-BEAM ON THE CATHODOLUMINESCENCE FROM INDENTED MGO IN THE SCANNING ELECTRON-MICROSCOPE
BALLESTEROS, C
LLOPIS, J
PIQUERAS, J
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) : 3201 - 3206
[6] LOW-COST ELECTRON-BEAM LITHOGRAPHY PACKAGE FOR THE SCANNING ELECTRON-MICROSCOPE
MCINTYRE, BL
DENNIS, CL
[J]. APPLIED OPTICS, 1988, 27 (02): : 196 - 196
[7] ELECTRON-MICROSCOPE TRANSMISSION ELECTRON-MICROSCOPE AND SCANNING ELECTRON-MICROSCOPE
WATANABE, T
[J]. DENKI KAGAKU, 1986, 54 (08): : 667 - 670
[8] NEW METHOD FOR DIRECTLY MONITORING THE ELECTRON-BEAM INTENSITY PROFILE IN A SCANNING ELECTRON-MICROSCOPE
RAJOPADHYE, NR
RAJA, NKL
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (08): : 2650 - 2652
[9] SCANNING ELECTRON-MICROSCOPE ATTACHMENT FOR ELECTRON-MICROSCOPE
MIYAUCHI, K
WATANABE, T
KUBOZOE, M
[J]. JOURNAL OF ELECTRON MICROSCOPY, 1972, 21 (03): : 256 - 256
[10] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS USING A PICOSECOND PHOTOELECTRON SCANNING ELECTRON-MICROSCOPE
PASTOL, Y
HALBOUT, JM
MAY, P
CHIU, G
[J]. SCANNING MICROSCOPY, 1989, 3 (02) : 443 - 447

← 1 2 3 4 5 →