MULTIPLE LAYER SPALLING IN SINGLE-CRYSTAL AL DURING HE ION-IMPLANTATION

被引：1
|
作者：
GREGGI, J [1 ]
CHOYKE, WJ [1 ]
TZENG, CF [1 ]
CHAMBERLAIN, CL [1 ]
DOYLE, NJ [1 ]
MATUZA, DM [1 ]
机构：
[1] WESTINGHOUSE ELECT CORP,CTR RES & DEV,PITTSBURGH,PA 15235
来源：
APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 07期
关键词：
D O I：
10.1063/1.92439
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：528 / 529
页数：2
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