OXIDATION OF AN INSB LAYER AFTER ION-IMPLANTATION

被引：3
|
作者：
MARTIN, P [1 ]
LIGEON, E [1 ]
GAILLIARD, JP [1 ]
机构：
[1] CEN,DEPT MET GRENOBLE PHS,F-38041 GRENOBLE,FRANCE
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1982年 / 197卷 / 01期
关键词：
D O I：
10.1016/0167-5087(82)90116-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：47 / 49
页数：3
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