共 50 条
- [21] Low-energy Ar ion-induced and chlorine ion etching of silicon [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (01): : 229 - 233
- [23] Enhanced diffusion as a mechanism for ion-induced damage propagation in GaN [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (03): : 603 - 608
- [29] INFLUENCE OF DOPING ON ION-INDUCED GROWTH AND SHRINKAGE OF PARTIAL DAMAGE IN SILICON [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 382 - 385
- [30] MeV ion-induced movement of lattice disorder in single crystalline silicon [J]. EUROPHYSICS LETTERS, 2000, 51 (04): : 401 - 406