MEASUREMENT OF TEMPERATURE PROFILES ACROSS SINGLE WAFERS IN RAPID THERMAL ANNEALERS

被引：0
|
作者：
PRAMANIK, D [1 ]
SAXENA, AN [1 ]
机构：
[1] GOULD SEMICOND,SANTA CLARA,CA 95051
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 21卷 / 2-4期
关键词：
D O I：
10.1016/0168-583X(87)90922-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：618 / 621
页数：4
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