Amplified spontaneous emission measurement of GaInNAs laser wafers with and without rapid thermal annealing

被引:3
|
作者
Nakatsuka, S [1 ]
Kondow, M [1 ]
Aoki, M [1 ]
Kudo, M [1 ]
Kitatani, T [1 ]
Tsuji, S [1 ]
机构
[1] Hitachi Ltd, Cent Res Lab, Tokyo 1858601, Japan
关键词
GaInNAs; laser diode; amplified spontaneous emission; rapid thermal anneal;
D O I
10.1143/JJAP.42.L1012
中图分类号
O59 [应用物理学];
学科分类号
摘要
The quality of a GaInNAs single-quantum-well heterostructure crystal for laser diodes grown by molecular beam epitaxy was estimated using amplified spontaneous emission (ASE) measurement. The effects of rapid thermal annealing (RTA) were also estimated. The ASE intensity was four times higher with RTA, which is consistent with the decrease in the threshold cur-rent of the laser diode. The slope of the ASE versus injection current density showed that a 40% non-radiative recombination remained even after RTA. Thus, non-radiative recombination is still a major problem in improving GaInNAs laser diodes.
引用
收藏
页码:L1012 / L1014
页数:3
相关论文
共 50 条
  • [1] Temperature measurement of wafers with varying multilayer structures during rapid thermal annealing
    Lerch, W
    Blersch, W
    Yanagawa, S
    [J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1998, 11 (04) : 598 - 606
  • [2] GAIN MEASUREMENT OF A CUBR LASER BY MEANS OF MODIFIED AMPLIFIED SPONTANEOUS EMISSION
    CHAN, WC
    LIU, HP
    YEN, SH
    CHEN, WY
    LIN, YH
    CHEN, WC
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 67 (09) : 3941 - 3942
  • [3] Improved crystallinity of GaInNAs by additional rapid thermal annealing (RTA)
    Kondow, M
    Kitatani, T
    Aoki, M
    Nakatsuka, S
    Kudo, M
    [J]. LEOS 2001: 14TH ANNUAL MEETING OF THE IEEE LASERS & ELECTRO-OPTICS SOCIETY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 622 - 623
  • [4] Measurement of amplified spontaneous emission noise in high power pulsed fiber laser
    Jia, Xiaodong
    Xia, Haiyun
    Shangguang, Mingjia
    Dou, Xiankang
    [J]. Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2015, 27 (05):
  • [5] MEASUREMENT OF THE AMPLIFIED SPONTANEOUS EMISSION LOSS IN AN IODINE PHOTODISSOCIATION LASER-AMPLIFIER
    HAHN, JW
    LEE, SS
    [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (10) : 3926 - 3928
  • [6] Microscopic theory of gain and spontaneous emission in GaInNAs laser material
    Hader, J
    Koch, SW
    Moloney, JV
    [J]. SOLID-STATE ELECTRONICS, 2003, 47 (03) : 513 - 521
  • [7] MEASUREMENT OF AMPLIFIED SPONTANEOUS EMISSION AT 200-A
    CEGLIO, NM
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (05): : 802 - 802
  • [8] Amplified spontaneous emission contrast of CPA laser
    Xu, Yi
    Leng, Yuxin
    Lin, Lihuang
    Wang, Wenyao
    Huang, Yansui
    Li, Ruxin
    Xu, Zhizhan
    [J]. CHINESE OPTICS LETTERS, 2010, 8 (01) : 123 - 125
  • [9] Amplified spontaneous emission contrast of CPA laser
    许毅
    冷雨欣
    林礼煌
    王文耀
    黄延穗
    李儒新
    徐至展
    [J]. Chinese Optics Letters, 2010, 8 (01) : 123 - 125
  • [10] Effects of rapid thermal annealing on GaInNAs GaAs multiple quantum wells
    Xin, HP
    Kavanagh, KL
    Kondow, M
    Tu, CW
    [J]. JOURNAL OF CRYSTAL GROWTH, 1999, 201 : 419 - 422