THERMODYNAMICS OF FORMATION OF NUCLEI AT THE INTERNAL OXIDE GETTER IN SILICON

被引：0
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作者：
PEKAREV, AI
PANASENKOVA, MI
BURMISTROV, AN
BULKIN, PV
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IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA | 1988年 / 31卷 / 08期
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O4 [物理学];
学科分类号：
0702 ;
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页码：25 / 29
页数：5
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