THE PURIFICATION OF SILICON FROM IMPURITIES USING AN INTERNAL GETTER

被引：0
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作者：
NEMTSEV, GZ
PEKAREV, AI
CHISTYAKOV, YD
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来源：
SOVIET MICROELECTRONICS | 1983年 / 12卷 / 05期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：219 / 226
页数：8
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