PRECISE ALIGNMENT THROUGH THICK WAFERS USING AN OPTICAL COPYING TECHNIQUE

被引：8
|
作者：
JAHNS, J
DASCHNER, W
机构：
[1] AT and T Bell Laboratories, Holmdel, NJ, 07733, Crawfords Corner Road
[2] Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, CA
来源：
OPTICS LETTERS | 1992年 / 17卷 / 06期
关键词：
D O I：
10.1364/OL.17.000390
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Submicrometer alignment of two mask patterns on the top and the bottom surface of a thick glass substrate is possible by using optical copying. The optical copying step transfers an alignment pattern from one surface to the other by shadow casting or Fresnel propagation. In a demonstration experiment, the alignment between the two surfaces of a 3-mm-thick quartz glass substrate was achieved with a precision of 0.5-0.7-mu-m.
引用
收藏
页码：390 / 392
页数：3
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