PRECISE ALIGNMENT THROUGH THICK WAFERS USING AN OPTICAL COPYING TECHNIQUE

被引：8
|
作者：
JAHNS, J
DASCHNER, W
机构：
[1] AT and T Bell Laboratories, Holmdel, NJ, 07733, Crawfords Corner Road
[2] Department of Electrical and Computer Engineering, University of California, San Diego, La Jolla, CA
来源：
OPTICS LETTERS | 1992年 / 17卷 / 06期
关键词：
D O I：
10.1364/OL.17.000390
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Submicrometer alignment of two mask patterns on the top and the bottom surface of a thick glass substrate is possible by using optical copying. The optical copying step transfers an alignment pattern from one surface to the other by shadow casting or Fresnel propagation. In a demonstration experiment, the alignment between the two surfaces of a 3-mm-thick quartz glass substrate was achieved with a precision of 0.5-0.7-mu-m.
引用
收藏
页码：390 / 392
页数：3
相关论文
共 50 条
  • [11] A precise optical interferometric technique using PDA and an application to a coherent optical network analyzer
    Yano, Tetsuo
    Maeda, Minoru
    Saitou, Hiroki
    Takai, Hironori
    Hirata, Takaaki
    2006 SICE-ICASE INTERNATIONAL JOINT CONFERENCE, VOLS 1-13, 2006, : 3403 - +
  • [12] PRECISE MEASUREMENTS OF OPTICAL DISPERSION USING A NEW INTERFEROMETRIC-TECHNIQUE
    VELSKO, SP
    EIMERL, D
    APPLIED OPTICS, 1986, 25 (08) : 1344 - 1349
  • [13] Precise patterning technique for Nb junctions using optical proximity correction
    Aoyagi, M
    Nakagawa, H
    Sato, H
    Akoh, H
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2001, 11 (01) : 381 - 384
  • [14] Nondestructive inspection of crystal defects in LiNbO3 wafers by using an optical technique
    Yamada, M
    Matsumura, M
    Fukuzawa, M
    Higuma, K
    Nagata, H
    INTEGRATED OPTICS DEVICES IV, 2000, 3936 : 101 - 106
  • [15] A NEW OPTICAL TECHNIQUE FOR CHARACTERIZATION OF TECHNOLOGICAL SEMICONDUCTOR WAFERS
    ASTAFIEV, OV
    KALINUSHKIN, VP
    YURYEV, VA
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1995, 34 (2-3): : 124 - 131
  • [16] SIMPLE TECHNIQUE FOR ACCURATE OPTICAL ALIGNMENT
    HAIG, ND
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (06): : 516 - 518
  • [17] Precise and robust position estimation for optical incremental encoders using a linearization technique
    Ye, Guoyong
    Liu, Hongzhong
    Fan, Shanjin
    Li, Xuan
    Yu, Haoyu
    Lei, Biao
    Shi, Yongsheng
    Yin, Lei
    Lu, Bingheng
    SENSORS AND ACTUATORS A-PHYSICAL, 2015, 232 : 30 - 38
  • [18] PRECISE MEASUREMENTS OF OPTICAL DISPERSION USING A NEW INTERFEROMETRIC-TECHNIQUE - COMMENT
    PECK, ER
    APPLIED OPTICS, 1986, 25 (20): : 3597 - 3598
  • [19] Design of a precise and robust linearized converter for optical encoders using a ratiometric technique
    Ye, Guoyong
    Fan, Shanjin
    Liu, Hongzhong
    Li, Xuan
    Yu, Haoyu
    Shi, Yongsheng
    Yin, Lei
    Lu, Bingheng
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2014, 25 (12)
  • [20] Precise Core Alignment in Fabrication of Polymer Optical Waveguides using the Mosquito Method for 3-dimensional Optical Circuits
    Date, Kumi
    Fukagata, Koji
    Ishigure, Takaaki
    INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XXII, 2018, 10535
12345