MEASUREMENT OF SMALL WEDGE ANGLES USING NOMARSKI INTERFEROMETRY, AND ITS APPLICATION TO SMALL SEMICONDUCTOR SAMPLES

被引：0

作者：

BALLINGALL, RA ^{[1
]}

SHERSBYH.RB ^{[1
]}

机构：

[1] SERV ELECTR RES LAB, BALDOCK SG7 6NG, HERTSFORDSHIRE, ENGLAND

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1974年 / 7卷 / 05期

关键词：

D O I：

10.1088/0022-3735/7/5/008

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：345 / 347

页数：3

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