MEASUREMENT OF SMALL WEDGE ANGLES USING NOMARSKI INTERFEROMETRY, AND ITS APPLICATION TO SMALL SEMICONDUCTOR SAMPLES

被引：0
|
作者：
BALLINGALL, RA [1 ]
SHERSBYH.RB [1 ]
机构：
[1] SERV ELECTR RES LAB, BALDOCK SG7 6NG, HERTSFORDSHIRE, ENGLAND
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1974年 / 7卷 / 05期
关键词：
D O I：
10.1088/0022-3735/7/5/008
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：345 / 347
页数：3
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