NUCLEATION AND GROWTH OF ALUMINUM-OXIDE ON SILICON IN THE CVD PROCESS

被引：20

|

作者：

CHOI, SW

KIM, C

KIM, JG

CHUN, JS

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1987年 / 22卷 / 03期

关键词：

D O I：

10.1007/BF01103550

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：1051 / 1056

页数：6

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