NUCLEATION AND GROWTH OF ALUMINUM-OXIDE ON SILICON IN THE CVD PROCESS

被引：20
|
作者：
CHOI, SW
KIM, C
KIM, JG
CHUN, JS
机构：
来源：
JOURNAL OF MATERIALS SCIENCE | 1987年 / 22卷 / 03期
关键词：
D O I：
10.1007/BF01103550
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1051 / 1056
页数：6
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