A STUDY OF THE DEPOSITION OF POLYMERIC MATERIAL ONTO SURFACES FROM FLUOROCARBON RF PLASMAS

被引：22
|
作者：
ASTELLBURT, PJ
CAIRNS, JA
CHEETHAM, AK
HAZEL, RM
机构：
[1] AERE,DIV ENGN SCI,HARWELL OX11 0RA,OXON,ENGLAND
[2] UNIV OXFORD,DEPT CHEM CRYSTALLOG,OXFORD,ENGLAND
来源：
PLASMA CHEMISTRY AND PLASMA PROCESSING | 1986年 / 6卷 / 04期
关键词：
D O I：
10.1007/BF00565553
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：417 / 427
页数：11
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