A STUDY OF THE DEPOSITION OF POLYMERIC MATERIAL ONTO SURFACES FROM FLUOROCARBON RF PLASMAS

被引：22

作者：

ASTELLBURT, PJ

CAIRNS, JA

CHEETHAM, AK

HAZEL, RM

机构：

[1] AERE,DIV ENGN SCI,HARWELL OX11 0RA,OXON,ENGLAND

[2] UNIV OXFORD,DEPT CHEM CRYSTALLOG,OXFORD,ENGLAND

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1986年 / 6卷 / 04期

关键词：

D O I：

10.1007/BF00565553

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：417 / 427

页数：11

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