OPTICAL MANIPULATION OF RESIST PROFILE IN CONFORMABLE PRINTING

被引：5
|
作者：
LIN, BJ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期
关键词：
D O I：
10.1116/1.569725
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1012 / 1015
页数：4
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