OPTICAL MANIPULATION OF RESIST PROFILE IN CONFORMABLE PRINTING

被引：5

作者：

LIN, BJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期

关键词：

D O I：

10.1116/1.569725

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1012 / 1015

页数：4

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