LARGE AREA COATINGS WITH UNIFORM THICKNESS FABRICATED IN A SMALL VACUUM CHAMBER

被引：3
|
作者：
HAYDEN, CJ [1 ]
SPILLER, E [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
APPLIED OPTICS | 1989年 / 28卷 / 14期
关键词：
D O I：
10.1364/AO.28.002694
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：2694 / 2696
页数：3
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