OBTAINING FILMS OF UNIFORM THICKNESS BY MEANS OF A PENNING GAS-DISCHARGE CHAMBER

被引：0
|
作者：
VEDERNIKOV, VA [1 ]
GURIN, VN [1 ]
DANILINA, TI [1 ]
机构：
[1] TOMSK AUTOMATED CONTROL SYST & RADIOELECTR INST,TOMSK,USSR
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1976年 / 19卷 / 03期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：888 / 891
页数：4
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