OBTAINING FILMS OF UNIFORM THICKNESS BY MEANS OF A PENNING GAS-DISCHARGE CHAMBER

被引：0

作者：

VEDERNIKOV, VA ^{[1
]}

GURIN, VN ^{[1
]}

DANILINA, TI ^{[1
]}

机构：

[1] TOMSK AUTOMATED CONTROL SYST & RADIOELECTR INST,TOMSK,USSR

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1976年 / 19卷 / 03期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：888 / 891

页数：4

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