EFFECTS OF HYDROGEN INCORPORATION IN SOME DEPOSITED METALLIC THIN-FILMS

被引：12

|

作者：

MEYER, DE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期

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D O I：

10.1116/1.570378

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：322 / 326

页数：5

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