EFFECTS OF HYDROGEN INCORPORATION IN SOME DEPOSITED METALLIC THIN-FILMS

被引：12
|
作者：
MEYER, DE
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期
关键词：
D O I：
10.1116/1.570378
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：322 / 326
页数：5
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