EFFECTS OF HYDROGEN INCORPORATION IN SOME DEPOSITED METALLIC THIN-FILMS

被引：12
|
作者：
MEYER, DE
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期
关键词：
D O I：
10.1116/1.570378
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：322 / 326
页数：5
相关论文
共 50 条
  • [1] HYDROGEN INCORPORATION IN SILICON THIN-FILMS DEPOSITED WITH A REMOTE HYDROGEN PLASMA
    JOHNSON, NM
    WALKER, J
    DOLAND, CM
    WINER, K
    STREET, RA
    APPLIED PHYSICS LETTERS, 1989, 54 (19) : 1872 - 1874
  • [2] THE EFFECTS OF COLLIMATION ON INTRINSIC STRESS IN SPUTTER-DEPOSITED METALLIC THIN-FILMS
    JANACEK, T
    LIU, D
    DEW, SK
    BRETT, MJ
    SMY, TJ
    THIN SOLID FILMS, 1994, 253 (1-2) : 372 - 376
  • [3] SIZE EFFECTS IN METALLIC THIN-FILMS
    GOVINDARAJ, G
    DEVANATHAN, V
    PHYSICAL REVIEW B, 1985, 32 (04): : 2628 - 2630
  • [4] HYDROGEN INCORPORATION IN SILICON (OXY)NITRIDE THIN-FILMS
    KUIPER, AET
    WILLEMSEN, MFC
    VANIJZENDOORN, LJ
    APPLIED PHYSICS LETTERS, 1988, 53 (22) : 2149 - 2151
  • [5] HYDROGEN SPUTTERING OF CARBON THIN-FILMS DEPOSITED ON PLATINUM
    SMITH, JN
    MEYER, CH
    LAYTON, JK
    JOURNAL OF NUCLEAR MATERIALS, 1977, 67 (1-2) : 234 - 235
  • [6] KINETICS OF HYDROGEN ABSORPTION IN OBLIQUELY DEPOSITED FETI THIN-FILMS
    JAIN, IP
    VIJAY, YK
    UPADHYAY, KS
    SINGH, M
    INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 1990, 15 (05) : 345 - 348
  • [7] PHASE FORMATION IN CO-DEPOSITED METALLIC ALLOY THIN-FILMS
    SAUNDERS, N
    MIODOWNIK, AP
    JOURNAL OF MATERIALS SCIENCE, 1987, 22 (02) : 629 - 637
  • [8] LASER DEPOSITED THIN-FILMS
    DRAGANESCU, V
    COMANICIU, N
    ALEXANDRESCU, R
    GEORGESCU, C
    STUDII SI CERCETARI DE FIZICA, 1973, 25 (07): : 847 - 854
  • [9] ELECTRICAL EFFECTS OF HYDROGEN ON SNTE THIN-FILMS
    DAWAR, AL
    TANEJA, OP
    SACHAR, BK
    MOHAMMED, AO
    KUMAR, P
    PARADKAR, SK
    MATHUR, PC
    APPLICATIONS OF SURFACE SCIENCE, 1982, 11-2 (JUL): : 598 - 604
  • [10] HYDROGEN IN THIN-FILMS
    LANFORD, WA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (08) : C372 - C372
12345