USE OF SPUTTERED CONDUCTOR MATERIALS IN FILM INTEGRATED-CIRCUITS

被引：7

作者：

LAU, SS ^{[1
]}

机构：

[1] BELL TEL LABS INC, ALLENTOWN, PA 18103 USA

来源：

关键词：

D O I：

10.1016/0040-6090(72)90372-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：87 / 103

页数：17

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