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ELECTRON BEAM CHANNELING IN SINGLE-CRYSTAL SILICON BY SCANNING ELECTRON MICROSCOPY

被引：24
|
作者：
WOLF, ED
EVERHART, TE
机构：
来源：
APPLIED PHYSICS LETTERS | 1969年 / 14卷 / 10期
关键词：
D O I：
10.1063/1.1652657
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：299 / &
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