ELECTRON BEAM MACHINING OF SILICON OBSERVED WITH SCANNING ELECTRON MICROSCOPE

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CHANG, THP

NIXON, WC

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RADIO AND ELECTRONIC ENGINEER | 1966年 / 31卷 / 05期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：261 / &

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