ELECTRON BEAM MACHINING OF SILICON OBSERVED WITH SCANNING ELECTRON MICROSCOPE

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作者：
CHANG, THP
NIXON, WC
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来源：
RADIO AND ELECTRONIC ENGINEER | 1966年 / 31卷 / 05期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：261 / &
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