PROPERTIES OF SPUTTERED MOS2 FILMS

被引：0
|
作者：
BUCK, V [1 ]
机构：
[1] DFVLR,INST TECH PHYS,D-7000 STUTTGART 80,FED REP GER
来源：
VAKUUM-TECHNIK | 1988年 / 37卷 / 04期
关键词：
Films; -; Morphology; Sputtering;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
The stoichiometry of sputtered MoS2 films depends mainly on the ratio of deposition rate of H2O-partial pressure during sputtering, where water is present in trace amounts. This variation of the stoichiometry causes changes of the morphology and of the lattice parameters of the films.
引用
收藏
页码：111 / 114
页数：4
相关论文
共 50 条
  • [41] Textured MoS2 thin films obtained on tungsten: Electrical properties of the W/MoS2 contact
    1600, American Institute of Physics Inc. (87):
  • [42] Textured MoS2 thin films obtained on tungsten:: Electrical properties of the W/MoS2 contact
    Gourmelon, E
    Bernède, JC
    Pouzet, J
    Marsillac, S
    JOURNAL OF APPLIED PHYSICS, 2000, 87 (03) : 1182 - 1186
  • [43] THE EFFECT OF SUBSTRATE SURFACE-ROUGHNESS ON THE FRICTION AND WEAR OF SPUTTERED MOS2 FILMS
    ROBERTS, EW
    WILLIAMS, BJ
    OGILVY, JA
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1992, 25 (1A) : A65 - A70
  • [44] LUBRICATING PROPERTIES OF PTFE COMPOSITE-MATERIALS COMBINED WITH SPUTTERED MOS2 FILMS .2. EFFECT OF ADDITION OF MOS2, AG, GRAPHITE AND W TO PTFE ON LUBRICATING PERFORMANCE
    MIYAKAWA, Y
    NOUDOMI, Y
    JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 1990, 35 (04) : 272 - 279
  • [45] ION-BEAM SPUTTERED MOS2 FILMS - PREPARATION, ANALYSIS, AND TRIBOLOGICAL PERFORMANCE
    BOLSTER, RN
    SINGER, IL
    WEGAND, JC
    FAYEULLE, S
    GOSSETT, CR
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1990, 200 : 22 - COLL
  • [46] Response of RF-sputtered MoS2 composite films to LEO space environment
    Gao, Xiaoming
    Hu, Ming
    Sun, Jiayi
    Fu, Yanlong
    Yang, Jun
    Liu, Weimin
    Weng, Lijun
    VACUUM, 2017, 144 : 72 - 79
  • [47] Growth of MoS2 by Controlled Sulfurization of Pulsed dc Sputtered Mo Thin Films
    Gupta, Nanhe Kumar
    Barwal, Vineet
    Pandey, Lalit
    Hait, Soumyarup
    Mishra, Vireshwar
    Kumar, Amar
    Chaudhary, Sujeet
    3RD INTERNATIONAL CONFERENCE ON CONDENSED MATTER & APPLIED PHYSICS (ICC-2019), 2020, 2220
  • [48] Characteristics of Sputtered p-Type MoS2 Thin Films and Their TFT Application
    Li, Kachou
    Shimizu, Kousaku
    Zairyo/Journal of the Society of Materials Science, Japan, 73 (09): : 735 - 742
  • [49] Impact of crystallinity on thermal conductivity of RF magnetron sputtered MoS2 thin films
    Kitazawa, Tatsuya
    Inaba, Yuta
    Yamashita, Shunsuke
    Imai, Shinya
    Kurohara, Keita
    Tatsumi, Tetsuya
    Wakabayashi, Hitoshi
    Tomiya, Shigetaka
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2024, 63 (05)
  • [50] Electrostatic properties of few-layer MoS2 films
    Hao, Guolin
    Huang, Zongyu
    Liu, Yundan
    Qi, Xiang
    Ren, Long
    Peng, Xiangyang
    Yang, Liwen
    Wei, Xiaolin
    Zhong, Jianxin
    AIP ADVANCES, 2013, 3 (04):
12345