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SOFT-X-RAY MULTILAYER PHASE-SHIFTER
被引:19
|作者:
YAMAMOTO, M
[1
]
YANAGIHARA, M
[1
]
NOMURA, H
[1
]
MAYAMA, K
[1
]
KIMURA, H
[1
]
机构:
[1] GRAD UNIV ADV STUDIES,PHOTON FACTORY,KEK,DEPT SYNCHROTRON RADIAT SCI,TSUKUBA 305,JAPAN
来源:
关键词:
D O I:
10.1063/1.1143007
中图分类号:
TH7 [仪器、仪表];
学科分类号:
0804 ;
080401 ;
081102 ;
摘要:
Phase shift versus incident angle characteristics of soft x-ray multilayer mirrors have been studied for the first time by rotating analyzer ellipsometry at 97 eV photon energy. Synchrotron radiation was used as a linear polarization source and a multilayer polarizer of 97% polarizance was used as the analyzer. By the reflection at two multilayers mounted in the double crystal configuration, circular polarization was produced. This confirmed a total phase shift of 90-degrees and proved the usefulness of the multilayer as a phase shifter for polarization evaluation.
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页码:1510 / 1512
页数:3
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