SOFT-X-RAY MULTILAYER PHASE-SHIFTER

被引：19
|
作者：
YAMAMOTO, M [1 ]
YANAGIHARA, M [1 ]
NOMURA, H [1 ]
MAYAMA, K [1 ]
KIMURA, H [1 ]
机构：
[1] GRAD UNIV ADV STUDIES,PHOTON FACTORY,KEK,DEPT SYNCHROTRON RADIAT SCI,TSUKUBA 305,JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1992年 / 63卷 / 01期
关键词：
D O I：
10.1063/1.1143007
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Phase shift versus incident angle characteristics of soft x-ray multilayer mirrors have been studied for the first time by rotating analyzer ellipsometry at 97 eV photon energy. Synchrotron radiation was used as a linear polarization source and a multilayer polarizer of 97% polarizance was used as the analyzer. By the reflection at two multilayers mounted in the double crystal configuration, circular polarization was produced. This confirmed a total phase shift of 90-degrees and proved the usefulness of the multilayer as a phase shifter for polarization evaluation.
引用
收藏
页码：1510 / 1512
页数：3
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