CHARACTERIZATION OF OXYGEN IN SILICON BY IR ABSORPTION - REVIEW

被引：0
|
作者：
PAJOT, B [1 ]
机构：
[1] UNIV PARIS 11,INFRAROUGE LAB,F-91405 ORSAY,FRANCE
来源：
ANALUSIS | 1977年 / 5卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
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页码：293 / 303
页数：11
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