CHARACTERIZATION OF OXYGEN IN SILICON BY IR ABSORPTION - REVIEW

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作者
PAJOT, B [1 ]
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[1] UNIV PARIS 11,INFRAROUGE LAB,F-91405 ORSAY,FRANCE
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O65 [分析化学];
学科分类号
070302 ; 081704 ;
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页码:293 / 303
页数:11
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