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- [8] Pattern profile control of polysilicon in magnetron reactive ion etchingJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1997, 15 (02): : 221 - 225Kimizuka, MOzaki, Y
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- [10] MEMS FABRICATION BY LITHOGRAPHY AND REACTIVE ION ETCHING (LIRIE)MICROELECTRONIC ENGINEERING, 1995, 27 (1-4) : 471 - 474RANGELOW, IWHUDEK, P